Work

Monte Carlo simulation of ion beam and background gas collisions

Year: 2025

Type: article

Abstract: In current beam simulation software, there is no functionality specifically designed for the generation and tracking calculation of secondary particles produced during beam transport. These secondary particles are produced from collisions between the beam and background gas, as well as collisions with the electrodes. These processes can lead to beam particle loss, energy dissipation, electrode overheating, and device arcing issues. This paper addresses this challenge using Lua code based on . It enables the complete calculation of particle generation, transport, and loss processes. It overcomes four shortcomings of EAMCC and comsol, enabling it to simulate various beam types and processes beyond just the extraction of negative hydrogen ions. To demonstrate the application of this code, we investigated the neutral beam overdose issue in ion implanters, thermal deposition in large-scale ion sources, and arcing problems in electrostatic low-energy beam transport.

Source: Physical Review Accelerators and Beams

DOI: 10.1103/physrevaccelbeams.28.030101