Work

Optimization of wide frequency range 6H-SiC MEMS chips for a fiber optic Fabry–Perot accelerometer

Year: 2025

Type: article

Source: Chinese Physics B

DOI: 10.1088/1674-1056/adc18e

Authors: Mariano 依思⋅马里亚诺 Mahissi 马, Xinli 新莉 Ma 马, Weiming 卫明 Cai 蔡, Xianmin 献民 Zhang 章, Michel 苏⋅米歇尔 Dossou 多

Institutions: Ningbo University of Technology, NingboTech University, Zhejiang University, Université d'Abomey-Calavi

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4408575586

FWCI: 0.231

Cites: 17

Cited by: 1

Related to: 10