Demonstration of 3-in full-wafer monolithic fabrication and wafer-level testing of MEMS-tunable single-mode ~1060nm VCSELs
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3056663
Authors: Wan Ying Ho, Calisto Ruiz, Douglas Eber, Daniel Kaas, Hany Issa, David Lyon, Colin Iversen, Alexander Yang, John V. Hryniewicz, Vijaysekhar Jayaraman, Christopher Burgner
Institutions: Praevium Research (United States), Thorlabs (United States)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4408601661
