Glass-based micro-opto electromechanical systems manufactured by laser induced deep etching
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3042817
Authors: Maik Bertke, Jannis Heinz, Svenja Schudak
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4408602127