Work

CMOS-compatible Al2O3 low loss waveguides for ultraviolet photonics integrated circuits

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3041427

Authors: Erfan Mafakheri, Zeinab Jafari, Gaudhaman Jeevanandam, Pieter Neutens, Nga Pham, Chupao Lin, Tangla D. Kongnyuy, Shiqi Fan, Nicolas Le Thomas, Philippe Helin, Pol Van Dorpe, Roelof Jansen, Christian Haffner, Stijn Jooken

Institutions: IMEC, Ghent University

Language: English

Topic: Photonic and Optical Devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4408602347

FWCI:

Cites:

Cited by:

Related to: 10