Lessons learned and ongoing research at Electra: a rep-rate excimer laser facility
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3041918
Authors: Matthew F. Wolford, Matthew C. Myers
Institution: United States Naval Research Laboratory
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4408604994