Machining of through-glass vias (TGVs) with femtosecond laser GHz burst modes
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3043097
Institution: Vilnius University
Language: English
Subfield: Computational Mechanics
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4408609633
