Highly efficient UV and DUV laser micro- and nanoprocessing for microelectronics applications
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3042723
Authors: Serhiy Danylyuk, Lutz Deriks, Julian Huertgen, Rene Faber, Rik Maes, Ralph F. Delmdahl, Ralf Knappe, Arnold Gillner
Language: English
Subfield: Computational Mechanics
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4408609671