3D target shape retention within selective laser-induced etching (SLE) via simulation of chemical etching
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3042062
Authors: Henry Axt, Martin Kratz, Christian Peters, Benedikt Bornschlegel, Christian Hinke
Language: English
Subfield: Computational Mechanics
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4408610158