Formation of through-glass vias (TGVs) in glass substrates using femtosecond laser operating in MHz/GHz burst mode
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3042970
Language: English
Subfield: Computational Mechanics
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4408655530
