Work

Experimental and modeling investigation on charged particle dynamics and electron power absorption mode in 400 kHz/27.2 MHz dual-frequency capacitively coupled argon discharges

Year: 2025

Type: article

Source: Plasma Sources Science and Technology

DOI: 10.1088/1361-6595/adc331

Authors: Yang Zhou, Kai Zhao, Fang-Fang Ma, Jing-Yu Sun, Yong-Xin Liu, Fei Gao, Yu-Ru Zhang, You-Nian Wang

Institutions: Dalian University of Technology, Key Laboratory of Materials Modification by Laser, Ion and Electron Beams

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, Fundamental Research Funds for the Central Universities

Awards: G4998678129, 面向工业等离子体源的一些关键科学问题的研究, G708640608

OpenAlex ID: W4408662823

FWCI: 0.902

Cites: 56

Cited by: 4

Related to: 10