Work

3D nanoprinting of beam shaping micro-optics on VCSEL chips integrated on a laser-written glass interposer

Year: 2025

Type: conference-paper

Abstract: We present a novel method for integrating Vertical Cavity Surface Emitting Lasers (VCSELs) into fused silica glass, combining precise embedding with the direct laser writing of polymer-based micro-optic elements. Custom-shaped cavities for GaAs-based VCSEL arrays (850nm) are formed via femtosecond laser irradiation and chemical etching. An electrical redistribution layer is created using polyimide coating, excimer laser via-drilling, TiW-Cu sputtering, and photolithographic patterning. Micro-optics for beam focusing are designed, fabricated via two-photon polymerization directly on the integrated VCSELs, and characterized.

DOI: 10.1117/12.3041119

Authors: Athanasios Kyriazis, Salah Eddine Guessoum, Tushar Malica, Martin Virte, Jürgen Van Erps, Geert Van Steenberge

Language: English

Topic: Semiconductor Lasers and Optical Devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: green

Funders: Fonds Wetenschappelijk Onderzoek, Vrije Universiteit Brussel, Interreg

Awards: Dense wavelength division multiplexed transmitter based on optical injection locking of strained vertical-cavity surface-emitting lasers, G3568916343, G6740296569

OpenAlex ID: W4408664005

FWCI:

Cites: 14

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Related to: 10