Work

An Improved Crystal Cell Offset Modeling and Atom Coding Approach for Monte Carlo Simulation of Quartz Wet Etching

Year: 2024

Type: conference-paper

Source: International Conference on Sensing, Measurement & Data Analytics in the era of Artificial Intelligence (ICSMD)

DOI: 10.1109/icsmd64214.2024.10920595

Authors: Qi Chen, Zibo Xu, Shuanqiang Song, Chenbao Lv, Xinjia Zhao, Meng Zhao, Jing Ji

Institution: Xidian University

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4408700826

FWCI:

Cites: 18

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Related to: 10