Work

Fabrication of Bulk Acoustic Wave Resonator with Multilayer Graphene Electrode

Year: 2025

Type: article

Abstract: Two bulk acoustic wave resonator (BAW) devices with multilayer graphene as bottom electrodes are fabricated using the chemical vapor deposition and pulsed laser deposition (PLD) methods. The multilayer graphene is confirmed to act as a Bragg reflector, which eliminates the necessity of introducing the traditional multiyear structure or creating an air cavity. Electrical tests reveal the existence of acoustic resonance on both devices at around 6 and 8.3 GHz. The results confirm that both multilayer graphene structures created by self‐folding and PLD methods are suitable for making BAWs. Thus, this study opens a new avenue for the application of multilayer graphene in microwave devices.

Source: physica status solidi (b)

DOI: 10.1002/pssb.202400638

Authors: Yuxuan Wang, Bin Zou, Neil McN. Alford, Peter K. Petrov

Institution: Imperial College London

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: hybrid

Estimated APC paid: $3,650

Funder: Engineering and Physical Sciences Research Council