Work

Time-Resolved Investigations of the Capacitive to Inductive Transition in a Microwave-Driven Plasma Source

Year: 2025

Type: article

Source: IEEE Transactions on Plasma Science

DOI: 10.1109/tps.2025.3547632

Authors: Horia-Eugen Porteanu, Ilija Stefanović, Michael Klute, Peter Awakowicz, Ralf-Peter Brinkmann, Wolfgang Heinrich

Institutions: Ferdinand-Braun-Institut, Ruhr University Bochum

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4408727264

FWCI:

Cites: 40

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Related to: 10