Work

Three-Level All-SiC High-Frequency High-Voltage Plasma Power Supply System

Year: 2025

Type: article

Abstract: Plasma power supplies are extensively utilized in various manufacturing and medical industries. Addressing the challenges of high-voltage and high-temperature resistance in current plasma power supply systems under high-frequency conditions, this study proposes a novel design method for an all-SiC high-frequency high-voltage plasma power supply system based on a three-level topology. Firstly, the design encompasses a three-level high-frequency inverter main circuit, a three-level high-frequency control main circuit, and a high-frequency high-voltage transformer. Subsequently, a high-frequency high-voltage plasma power supply system, equipped with a rotary motor, was developed and experimentally validated. Finally, the system achieved a stable power output with a frequency of 25 kHz, an output voltage of 21.03 kV, and an output power of 13.42 kW. The experimental results demonstrate that the plasma power supply system exhibits stable output voltage and maintains an operating temperature under high-frequency and high-voltage conditions.

Source: Energies

DOI: 10.3390/en18071617

Authors: Kaida Cai, Jing Xiao, Zhe Yang, Ranghao Hu

Institution: Guilin University of Electronic Technology

Language: English

Topic: Multilevel Inverters and Converters

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDGs: Affordable and clean energy, Industry, innovation and infrastructure

Open Access status: gold

Estimated APC paid: $3,137