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Simulation and Experimental Analysis of Contactless Chip Pickup Process Based on a Vortex Flow Gripper

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Year: 2025
Type: article
Source: IEEE Transactions on Semiconductor Manufacturing
DOI: 10.1109/tsm.2025.3553559
Authors: Peiran Zhai, Zhoulong Xu, Zhouping Yin, Xiaohang Li, Bin Xie, Hao Wu
Institutions: Huazhong University of Science and Technology, King Abdullah University of Science and Technology
Language: English

Topic: 3D IC and TSV technologies
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences

Open Access status: closed

Funders: National Pingtung University of Science and Technology, National Key Research and Development Program of China
Award: G6150420632
OpenAlex ID: W4408791143
FWCI: 0.693
Cites: 15
Cited by: 3
Related to: 10
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