Work

Impact of Si3N4 layer insertion to hybrid modes in low-velocity surface acoustic wave resonator on LiTaO3/SiO2/Si substrate

Year: 2025

Type: article

Source: Japanese Journal of Applied Physics

DOI: 10.35848/1347-4065/adc3a1

Authors: Weijian Zhou, Richeng Hu, Yingbo Kang, Jingfu Bao, Ken-Ya Hashimoto

Institution: University of Electronic Science and Technology of China

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4408808643

FWCI: 0.482

Cites: 29

Cited by: 2

Related to: 10