Work

Fabrication of customized low-loss optical resonators by combination of FIB-milling and CO 2 laser smoothing

Year: 2025

Type: article

Abstract: Fabry-Perot cavities are essential tools for applications like precision metrology, optomechanics and quantum technologies. A major challenge is the creation of microscopic spherical mirror structures which allow the precise matching with the wavefront of a Gaussian beam, while providing high surface quality. We present a novel fabrication technique, enabling the creation of customized microscopic cavity mirror structures over a wide range of geometrical parameters, by combining focused ion beam (FIB) milling and CO 2 laser smoothing. While FIB milling allows us to imprint features on the mirror substrate with a resolution on the nanometer scale, the application of defocused CO 2 laser pulses consistently reduces remaining surface deformations down to a roughness of σ RMS = 0.2 nm. The average deviation of the profile from a spherical shape is kept below a few nanometers. This technique enables the customized and repeatable fabrication of low loss optics on a wide range of optical substrates, including optical fibers. Thus, Fabry-Perot cavities can be fabricated with pre-defined modal volume, high finesse and tailored ellipticity. Since the structural shape of the mirror is created by FIB milling, its pixel-by-pixel nature of the writing process can be used to create arbitrary structures with a resolution given by the FIB milling. At the same time, the surface quality is given by the CO 2 laser smoothing processes, without degrading the FIB milled shape.

Source: Optics Express

DOI: 10.1364/oe.557212

Authors: Patrick Maier, Simon Rupp, Niklas Lettner, Johannes Hecker Denschlag, Alexander Kubanek

Institution: Universität Ulm

Language: English

Topic: Laser Material Processing Techniques

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: gold

Estimated APC paid: $2,270