Scatterometry with nanometer sensitivity for non-destructive quality inspection of gratings and thin films
Year: 2025
Type: conference-abstract
DOI: 10.1117/12.3063121
Author: Jaime Gómez Rivas
Institution: Eindhoven University of Technology
Language: English
Subfield: Computer Vision and Pattern Recognition
Field: Computer Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4408828612