Enhancing waveguide output uniformity by advanced patterning techniques
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3063123
Author: Eleonora Storace
Institution: IMEC
Language: English
Topic: Photonic and Optical Devices
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4408828702