A self-correction algorithm for positioning error in sequential point bending tests of a microbeam for Young’s modulus based on atomic force microscopy
Year: 2025
Type: article
Abstract: The single-point bending method, based on atomic force microscopy (AFM), has been extensively validated for characterizing the structural mechanical properties of micro- and nanobeams. Nevertheless, the influence of AFM probe loading and positioning has yet to be subjected to comprehensive investigation. This paper proposes a novel bending-test method based on sequential loading points, in which a series of evenly distributed loads are applied along the length of the central axis on the upper surface of the cantilever. The preliminary measured values of Young’s modulus for an unknown alloy material were 193, 178, and 176 GPa, exhibiting a considerable degree of dispersion. An algorithm for self-correction of the positioning error was developed, and this resulted in a positioning error of 53 nm and a final converged Young’s modulus of 161 GPa.
DOI: 10.1063/10.0036132
Authors: Yuxin Liu, Linyan Xu
Institution: Tianjin University
Language: English
Subfield: Atomic and Molecular Physics, and Optics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: diamond
OpenAlex ID: W4408847572