Interfacial Reaction Engineering for Use in Hf0.5Zr0.5O2-Based Metal-Ferroelectric-Metal Capacitors Using N2 + H2 Gas Pretreatment
Year: 2025
Type: article
Source: ACS Applied Electronic Materials
Authors: Seung Yeon Kim, Dong Hee Han, Jaehyeon Yun, Woojin Jeon
Institution: Kyung Hee University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4408848705
