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Fast Response and Low-Noise Optical Pressure Measurements Based on Squeeze-Film Damping Effect

Year: 2025

Type: article

Source: IEEE Transactions on Instrumentation and Measurement

DOI: 10.1109/tim.2025.3553948

Authors: Hong Yang, Yuqiang Hu, Qihang Huang, Qing Sun, Hao Chen, Zhenyu Wu

Institutions: National Institute of Metrology, Chinese Academy of Sciences, Institute of Electronics, Shanghai Institute of Microsystem and Information Technology, University of Rochester, State Key Laboratory of Transducer Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Yunnan Key Research and Development Program

Awards: G530482902, G5704989410

OpenAlex ID: W4408858674

FWCI:

Cites: 27

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Related to: 10