Work

Study on applicability of dielectric strips for transverse mode suppression of I.H.P. SAW resonators using low cut LiTaO3 plate

Year: 2025

Type: article

Abstract: This paper discusses the applicability of the dielectric (SiO2) strips for the transverse mode suppression of incredible high-performance surface acoustic wave (SAW) resonators employing a thin LiTaO3 (LT) plate with small LT cut angle θ. Proper setting of the metallization ratio (MR) makes the SAW slowness curves curvature small and electromechanical coupling factor (k 2) large. When MR is set at 0.35, the transverse modes are suppressed well even when θ is reduced to 24° and degradation of the Bode Q is not obvious, although achievable k 2 is a little lower than the case of MR = 0.5. When MR is set at 0.5, although the transverse mode can be suppressed when θ is larger than 34°, degradation of the Bode Q becomes obvious with the decrease of θ.

Source: Japanese Journal of Applied Physics

DOI: 10.35848/1347-4065/adc588

Authors: Fangyi Li, Yiwen He, Yiming Liu, Ying Yang, Jingfu Bao, Ken-ya Hashimoto

Institution: University of Electronic Science and Technology of China

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: hybrid

Estimated APC paid: $2,210

Funders: National Natural Science Foundation of China, China Academy of Engineering Physics