Work

System Modeling of a Multi-Contact Microelectromechanical Logic Element

Year: 2024

Type: article

Source: Nano- i Mikrosistemnaya Tehnika

DOI: 10.17587/nmst.26.260-267

Authors: A.A. Solovev, E.F. Pevtsov, V.A. Kolchuzhin

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4408919202

FWCI: 0.206

Cites:

Cited by: 2

Related to: 10