Highly integrated multiplexed microscopy system for integrated circuit failure analysis
Year: 2025
Type: article
Source: Optics Letters
DOI: 10.1364/ol.558928
Authors: Haotian Li, Junliang Liu, Cheng Fei, Yakui Dong, Yongfu Li, Shuolin Yang, Linshan Sun, Mengda Wang, Shuzhen Fan, Zhongming Yang, Xian Zhao
Institution: Shandong University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Awards: G5899577037, G6465062813
OpenAlex ID: W4408926895