Work

Study of Frequency Trimming Ability and Performance Enhancement of Thin-Film Piezoelectric-on-Silicon MEMS Resonators by Joule Heating via Localized Annealing

Year: 2025

Type: article

Source: IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

DOI: 10.1109/tuffc.2025.3556305

Authors: Ugur Guneroglu, Adnan Zaman, Abdulrahman Alsolami, Ivan F. Rivera, Jing Wang

Institutions: University of South Florida, Intel (United States)

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Science Foundation, Ministry of Education, Youth and Science, U.S. Army Medical Research and Development Command

Awards: GOALI: Mm-Wave Reconfigurable Additive Manufactured Packaging Systems (RAMPS) using Pulsed Picosecond Laser Processing, G4677596405, Collaborative Research: FuSe: Thermal Co-Design for Heterogeneous Integration of Low Loss Electromagnetic and RF Systems (The CHILLERS)

OpenAlex ID: W4409014726

FWCI: 0.938

Cites: 30

Cited by: 4

Related to: 10