Enhanced Ruthenium Removal and Superior Surface Quality via Abrasive‐Free Chemical Mechanical Polishing Using Synergistic Catalysis with the H2O2/PDS/FeIII‐NTA System
Year: 2025
Type: article
Source: Small
Authors: Yufei You, Ziwei He, Jianwei Zhou, Yuhang Qi, Chong Luo
Institution: Hebei University of Technology
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Awards: G5300558380, G8850047990
OpenAlex ID: W4409018065