Work

Versatile femtosecond laser interference patterning for high-precision nanostructuring of semiconductors and metal films

Year: 2025

Type: conference-abstract

DOI: 10.1117/12.3039777

Authors: Irene Solana, Fernando Chacon-Sanchez, Eneko Aiartza, Mario Garcia-Lechuga, Jan Siegel

Institution: Instituto de Óptica "Daza de Valdés"

Language: English

Topic: Laser Material Processing Techniques

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4409020411

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