Machine learning assisted optimization of surface roughness on silicon
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3039016
Authors: Eric P. Mottay, Wahib Mirgan Barkat, Emile Barjou, Anthony Bertrand, Girolamo Mincuzzi
Institution: ALPhANOV (France)
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4409020431