Work

Parametric Analysis of Substrate Heating in Low-Pressure Inductively Coupled Plasma

Year: 2025

Type: article

Abstract: Jin-Hoo Seong, Hee-Jung Yeom, Min Young Yoon, Do-Yeon Hwang, Hye-Jin Ju, Wooram Kim, Hyo-Chang Lee, and Jung-Hyung Kim. Applied Science and Convergence Technology 2025;34:75-9. https://doi.org/10.5757/ASCT.2025.34.2.75

Source: Applied Science and Convergence Technology

DOI: 10.5757/asct.2025.34.2.75

Authors: Jin-Hoo Seong, Hee-Jung Yeom, Min Young Yoon, Do-Yeon Hwang, Hye-Jin Ju, Wooram Kim, Hyo-Chang Lee, Jung-Hyung Kim

Institutions: Korea Aerospace University, Korea Research Institute of Standards and Science

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: diamond

Funders: National Research Foundation, Ministry of Trade, Industry and Energy, Korea Research Institute of Standards and Science, National Fusion Research Institute, National Research Foundation of Korea, National Research Council of Science and Technology, Ministry of Science and ICT, South Korea, Korea Semiconductor Research Consortium, Korea Evaluation Institute of Industrial Technology

Awards: G1491680630, G1713131959, G2561380961, G2752232947, G2978557231, G3868166233, G3969275231, G5031028196, G5706237474, G6764738055, G6821527106, G8363443137, G939788898

OpenAlex ID: W4409100328

FWCI: 0.231

Cites: 39

Cited by: 1

Related to: 10