Optimized Encapsulation Design for Reducing Low-Frequency Loss in MEMS Ciliary Hydrophones
Year: 2025
Type: article
Source: IEEE Sensors Journal
Authors: Zimeng Guo, Guojun Zhang, Ruimin Zhang, Yuhao Huang, Jiangjiang Wang, Wenqing Zhang, Wendong Zhang
Institution: North University of China
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Award: G3598529726
OpenAlex ID: W4409129097