Work

Design and Fabrication of Accelerometer Based on Atomic Force Microscope Measurement Principle

Year: 2025

Type: article

Source: IEEE Sensors Journal

DOI: 10.1109/jsen.2025.3555996

Authors: Bin Miao, Hongji Guo, Dingyi Wang, Wen Xiong, Changkun Feng, Zhan Xu, Siyuan Fang, Hanwenyu Zhan, Peng Yu, Jiadong Li

Institutions: University of Science and Technology of China, Shenyang Institute of Automation, Chinese Academy of Sciences, State Key Laboratory of Robotics, Huazhong University of Science and Technology, Suzhou Institute of Nano-tech and Nano-bionics

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, National Key Research and Development Program of China

Awards: G2831238497, G6234028110, G6957531135

OpenAlex ID: W4409153098

FWCI:

Cites: 27

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Related to: 10