Work

Alloy Films Sputtering M1xM2(1–x)

Year: 2025

Type: article

Source: LETI Transactions on Electrical Engineering & Computer Science

DOI: 10.32603/2071-8985-2025-18-1-22-29

Authors: N. M. Ivanov, V. I. Shapovalov, D. S. Sharkovskii

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4409164013

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