Work

Optimization of Unevenness of Aluminum and Aluminum Oxide Coatings Obtained by Magnetron Sputtering under Mutual Movement of Substrate and Magnetron

Year: 2025

Type: article

Source: LETI Transactions on Electrical Engineering & Computer Science

DOI: 10.32603/2071-8985-2025-18-1-14-21

Authors: JSC SPE «ESTE», V. I. Cherkunov

Language: English

Topic: Optical Coatings and Gratings

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4409164076

FWCI: 0.209

Cites:

Cited by: 1

Related to: 10