Work

Deformation Mechanism of Indium Phosphide Wafers by Indenter Shape in Nanoindentation

Year: 2025

Type: article

Source: The Journal of Physical Chemistry C

DOI: 10.1021/acs.jpcc.5c01363

Authors: Zilei Bai, Jiayun Deng, Xiaoning Wen, Jiacheng Geng, Hua Wei, Hanbao Liu, Feng Qiu, Feng Hui

Institutions: Kunming University of Science and Technology, Xiangtan Electric Manufacturing Group (China), Yuyao Joywee Electrics (China)

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Analysis and Testing Foundation of Kunming University of Science and Technology

Awards: G7675244516, G8306695895

OpenAlex ID: W4409231307

FWCI: 2.629

Cites: 29

Cited by: 8

Related to: 10