Direct evidence and thermodynamics for the conversion between nitrogen pairs and interstitial nitrogen atoms in nitrogen-doped Czochralski silicon
Year: 2025
Type: article
Source: Applied Physics Letters
DOI: 10.1063/5.0252869
Institution: Zhejiang University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Award: G287522004
OpenAlex ID: W4409234140