Electron impact ionization cross-sections of carbon-fluorine environmental gases for photolithography
Year: 2025
Type: article
Authors: Yuwei Ma, Yunliang Song, Bowen Li
Institution: Lanzhou University
Language: English
Topic: Atomic and Molecular Physics
Subfield: Atomic and Molecular Physics, and Optics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
Award: G7699314284
OpenAlex ID: W4409252517