High-resolution coherence scanning immersion interferometry for characterization of sub-micrometer surface structures
Year: 2025
Type: article
Source: tm - Technisches Messen
Institution: University of Kassel
Language: English
Subfield: Computer Vision and Pattern Recognition
Field: Computer Science
Domain: Physical Sciences
Open Access status: closed
Funder: Deutsche Forschungsgemeinschaft
OpenAlex ID: W4409273793