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The Tiny Supernovas Inside an EUV Machine: The Same Math that Describes Exploding Stars is Keeping Moore's Law Going

Year: 2025

Type: article

Source: IEEE Spectrum

DOI: 10.1109/mspec.2025.10960503

Authors: Jayson Stewart, Rudolf Schultz, Daniel Brown

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4409310603

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