Work

Deep Wet Etching of a Z-Cut α-Quartz Wafer by Fluorine-Based Solutions: Experiment, Mechanism, and Application

Year: 2025

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2025.3555563

Authors: Hong Xue, Jiabin Ai, Zichao Zhang, Bo Li, Bing Bai, Cun Li, Yulong Zhao

Institutions: State Key Laboratory of Mechanical Manufacturing System Engineering, Xi'an Jiaotong University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Awards: G2620384218, G3308394366

OpenAlex ID: W4409311526

FWCI: 1.155

Cites: 44

Cited by: 5

Related to: 10