Work

Modification of the structure and composition of tantalum oxynitride coatings depending on the deposition conditions

Year: 2025

Type: conference-paper

Abstract: The combination of mechanical strength, biocompatibility, and functional versatility makes oxynitride coatings a promising material for various biomedical applications. Significant changes were detected in tantalum oxynitride’s structure and composition as a function of the conditions of deposition and the reactive gasses ratio in a mixture N2/O2 at a constant total flowrate. Analysing the TaON coatings’ IR and Raman spectra along with the results of XRD and EDX studies provides useful information about the coatings’ compositional and structural characteristics in view of possible multifunctional applications.

Source: Journal of Physics Conference Series

DOI: 10.1088/1742-6596/2994/1/012019

Authors: N Donkov, A Zykova, V Safonov, S Dudin, S Yakovin, M Sawczak, M Klein, G Kolev

Institutions: Bulgarian Academy of Sciences, Institute of Electronics, Kharkiv Institute of Physics and Technology, V. N. Karazin Kharkiv National University, Institute of Fluid Flow-Machinery, Polish Academy of Sciences, University of Chemical Technology and Metallurgy

Language: English

Topic: Surface Treatment and Coatings

Subfield: Mechanical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: diamond

OpenAlex ID: W4409355749

FWCI:

Cites: 8

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Related to: 10