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Epitaxy of high-quality antiferromagnetic metal chromium nitride films with 90° and 40° off-axis magnetron sputtering

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Year: 2025
Type: article
Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
DOI: 10.1116/6.0004445
Authors: Zhiliang Xu, Rongjing Zhai, Jiachang Bi, Ruyi Zhang, Chuyi Ning, Zhangyuan Guo, Yanwei Cao
Institutions: Ningbo University, Chinese Academy of Sciences, Ningbo Institute of Industrial Technology, University of Chinese Academy of Sciences
Language: English

Topic: Magnetic properties of thin films
Subfield: Atomic and Molecular Physics, and Optics
Field: Physics and Astronomy
Domain: Physical Sciences

Open Access status: closed

Funder: National Key Research and Development Program of China
Awards: G7226018011, G8398589713
OpenAlex ID: W4409364926
FWCI:
Cites: 68
Cited by:
Related to: 10
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