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Optical characterization of X-ray polymer refractive lenses using a microfocus X-ray grating interferometer

Year: 2025
Type: article
Abstract: Two-photon polymerization lithography is a technique that provides hundreds of nanometer resolution and full geometric freedom.Several X-ray polymer refractive lenses created by this technique were characterized using differential phase contrast imaging (DPCI) with a microfocus X-ray grating interferometer.The beam deflection angle and wavefront phase shift of the X-ray beam through the lens were obtained.Comparative tests using synchrotron radiation sources showed that the system could measure the surface shape of X-ray refractive lenses with an accuracy of 0.4 μm.This study is important for improving the fabrication process and focusing performance of X-ray refractive lenses.
DOI: 10.3788/col202523.043401
Authors: Dongxu Qin, Lian Xue, Yifan Ding, Ziwen Huang, Lei Yang, Zhaofeng Kang, Keyi Wang, Shuai Zhao
Institutions: University of Science and Technology of China, Chinese Academy of Sciences, Shanghai Advanced Research Institute, Shanghai Synchrotron Radiation Facility, Hefei University of Technology, National Synchrotron Radiation Laboratory
Language: English
Subfield: Radiation
Open Access status: bronze
OpenAlex ID: W4409371999
FWCI: 0.638
Cites: 29
Cited by: 1
Related to: 10