Year: 2025
Type: conference-paper
Abstract: My PhD research focuses on developing a highly accurate and explainable multi-output virtual metrology system for semiconductor manufacturing. Using machine learning, we predict the physical properties of metal layers from process parameters captured by production equipment sensors. Key contributions include a model-agnostic explanatory method based on projective operators, providing insights into the most influential features for multi-output predictions and feature selection algorithms for these tasks.
Author: Amina Mević
Institution: University of Sarajevo
Language: English
Subfield: Artificial Intelligence
Field: Computer Science
Domain: Physical Sciences
Open Access status: diamond
OpenAlex ID: W4409381797