Suppression of Hillock Defects on (010) β-Ga2O3 Homoepitaxial Layer Growth via Halide Vapor Phase Epitaxy
Year: 2025
Type: article
Source: Crystal Growth & Design
Authors: Haohan Ye, Defan Wu, Zhun Yang, Dacheng Xu, Yuchao Yan, Zhu Jin, Ning Xia, Hui Zhang, Deren Yang
Institution: Zhejiang University
Language: English
Topic: Ga2O3 and related materials
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4409404183
