Work

Perfectly Spatial and Shape-Controllable Nanocrack Lithography via Localized Compressive-Shear Stress Coupling

Year: 2025

Type: article

Source: ACS Applied Materials & Interfaces

DOI: 10.1021/acsami.4c20778

Authors: Xu Tian, Sang-Min Kim, Jae-Young Yoo, Min-Seung Jo, Jun-Bo Yoon, Min-Ho Seo

Institutions: Korea Advanced Institute of Science and Technology, KTH Royal Institute of Technology, Pusan National University, Sungkyunkwan University, Northwestern University

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

Funder: National Research Foundation of Korea

Awards: G1311411192, G2235668619, G3182502753, G388386966

OpenAlex ID: W4409407012

FWCI:

Cites: 58

Cited by:

Related to: 10