A Wafer-Level Vacuum-Packaged MEMS Quadruple Mass Gyroscope Operated in Mode-Split and Open-Loop Detection
Year: 2025
Type: article
Source: IEEE Sensors Letters
Authors: Shaolei Ge, Bo Jiang, Shenhu Huang, Yan Su
Institution: Nanjing University of Science and Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4409473695