Work

Laser Micromachining 3-D Free Standing Structure of MEMS Thermal Flow Sensor

Year: 2025

Type: article

Source: IEEE Sensors Journal

DOI: 10.1109/jsen.2025.3559179

Authors: Mohammad Nizar Bin Mohamed Zukri, Muhammad Salman Al Farisi, Yoshihiro Hasegawa, Mitsuhiro Shikida

Institution: Hiroshima City University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Japan Society for the Promotion of Science London, Ministry of Education, Culture, Sports, Science and Technology, Japan Society for the Promotion of Science

Awards: G3197004978, Biodegradable implantable multi-modal sensor for quantitative vital monitoring inside pulmonary airway

OpenAlex ID: W4409494048

FWCI: 0.693

Cites: 33

Cited by: 3

Related to: 10